| 摘要 |
The peripheral edge of a wafer is cramped by four cramp rollers which are able to move forward and backward with respect to a reference point, and thereby, the center of the wafer is positioned at the reference point. Then, a notch pin, which is provided on a reference line, is pressed against the peripheral edge of the wafer, and the wafer is rotated about the reference point. Thereby, a notch on the wafer moves to the notch pin, and then, the notch pin fits into the notch. Thus, the wafer is positioned at a predetermined position.
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