POWER SOURCE DEVICE FOR PLASMA GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device whose cost and space can be reduced and can easily correspond to various plasma generation conditions by outputting power having a prescribed frequency from a basic power output unit, modulating the amplitude of the power by means of a modulator and supplying power to a plasma generation device. SOLUTION: Power having a prescribed frequency is outputted from a basic power output unit, the amplitude of the power is modulated by a modulator and power is supplied to a plasma generation device. In the device, the modulator 12 modulates power having a basic frequency oscillated by a basic power output unit 11 and a non-linear function circuit processing the basic frequency by adjusting it to the frequency of a modulation wave is formed. A high frequency generation device 10 can designate the frequency of the modulation wave for modulation by permitting a worker to operate the operation part. Power having the basic frequency is amplitude-modulated by the non-linear function circuit in the modulator 12 by adjusting it to the frequency of the designated modulation wave and a waveform becomes different from that of original power.