Method and apparatus for in situ gas concentration measurement

摘要

A method and apparatus for in situ measurement of the concentration of a gas with a frequency modulated tunable diode laser is disclosed. The sampling cell, which is mounted in the flow of gases to be measured, is a Herriott cell. Gas enters the sampling cell through sintered metal filters that prevent entrance of particulates. Signals from a sample detector and a null detector are compared to eliminate interference patterns from the laser optics. High accuracy dynamic calibration of the apparatus is also disclosed.