| 摘要 |
PCT No. PCT/KR97/00025 Sec. 371 Date Aug. 11, 1998 Sec. 102(e) Date Aug. 11, 1998 PCT Filed Feb. 12, 1997 PCT Pub. No. WO97/29112 PCT Pub. Date Aug. 14, 1997Novel magnesium dialkylaluminum alkoxide derivative represented by Mg[( mu -OR')2AlR2]2 wherein R and R' are each a C1-5 alkyl group and R is not the same as R', preferably magnesium dimethylaluminum isopropoxide, is easily prepared by reacting a trialkylaluminum with an alcohol or an aluminum trialkoxide to obtain a dialkylaluminum alkoxide; reacting the dialkylaluminium alkoxide with an alkali metal alkoxide to obtain an alkali metal dialkylaluminum alkoxide; and reacting the alkali metal dialkylaluminum alkoxide with a magnesium halide. The alkoxide derivative of the present invention can be vaporized at a low temperature, below 70 DEG C. and, therefore, effectively employed in the CVD process of a magnesium aluminate film.
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