| 摘要 |
PURPOSE: A reaction furnace of horizontal type is provided to prevent adhesion of reaction materials to the inner wall of external tubes by suppressing flow of the reaction gas into the space between the external tubes of the reaction furnace. CONSTITUTION: A reaction furnace according to the present invention comprises a heating chamber (10), an external tube (20) penetrating the heating chamber (10), an internal tube (30) installed inside of the external tube (20), a front door (80a) and a rear door (80b) installed on both sides of the external tube (20), a first bridging flange (70a) and a second bridging flange (70b) positioned at the front door (80a) and the rear door (80b) and between both ends of the external tube (20) respectively, a gas nozzle (6) installed at the first bridging flange on the front door side, an induction section (103) installed adjacent to the gas nozzle for preventing flow of the reaction gas into the space between the external tube (20) and the internal tube (30) and inducing the reaction gas to flow into the inside of the internal tube (30).
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