BOAT LINER TABLE OF WAFER CONVEYING SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A boat liner table of a wafer conveying system for a semiconductor manufacturing apparatus is provided to suppress the quartz powder generation caused by friction between a boat and the boat liner table by using the boat liner table made of ceramic material. CONSTITUTION: A boat liner table of a wafer conveying system for a semiconductor manufacturing apparatus is disposed on a boat liner for carrying wafer to a boat. The boat liner table is made of a material that can prevent the table from being scratched or broken when the table contacts the boat. Preferably, the material has a ceramic having a high thermal-resistance.