| 摘要 |
PURPOSE: A chamber equipment having a bubbler for manufacturing a semiconductor device is provided to reduce chemical consumption, by preventing consumption of a reaction gas which does not contribute to deposition. CONSTITUTION: A chamber equipment having a bubbler for manufacturing a semiconductor device comprises a plurality of dispersion heads, a plurality of susceptors, a first piping(700), a bubbler(500), a second piping(510), a third piping(530), and a switching part. The dispersion heads are equipped in a chamber as concentric circle shapes. The susceptors are equipped opposite to the dispersion heads, are rotatory moved for the dispersion heads in order, and a semiconductor substrate is mounted on the susceptors in order. The first piping supplies a reaction gas to the dispersion heads. The bubbler is connected to the first piping and has chemicals. The second piping is connected to the bubbler and supplies a bubbling gas generating the reaction gas from the chemicals. The third piping is branched and is directly connected to the first piping. The switching part is mounted on a connection part of the second and the third piping, and supplies the bubbling gas by switching the bubbling gas to the third piping through the second piping.
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