APPARATUS FOR SEMICONDUCTOR MANUFACTURING

摘要

PURPOSE: A photo spinner is provided to prevent the stagnation of wafer between a cassette loader/unloader and a process system. CONSTITUTION: A photo spinner has a buffer between a process system and a loader/unloader so that a wafer is transferred from a cassette loader/unloader(10) to a buffer(20). The wafer is transferred to a process system(30), and wafer processing is completed. The wafer is transferred to cassette loader/unloader(10) through the buffer(20) again.