发明名称 DEVICE FOR SENSING LEAKAGE OF ULTRASONIC CLEANING TANK
摘要 PURPOSE: A device for sensing leakage of the ultrasonic cleaning tank is provided to sense the leakage beforehand by using the first protection unit and the second sensing unit. CONSTITUTION: A device comprises a chamber for injection, an injection head, a water flow preventing baffle, a blocking layer, a belt, a heater block, an ultrasonic cleaning tank, an automatic valve(65, 67), an exhaust pipe(66), a supply conduit(68), a water leakage storing supporting bar(70), a water leakage sensor(72), and a water exhaust pipe(74). The water leakage storing supporting bar(70) which has a certain height is installed in the ultra sonic cleaning tank. The water leakage sensor(72) is installed at one side of the water storing supporting bar and the other side is connected with the water exhaust pipe(74).
申请公布号 KR20000027095(A) 申请公布日期 2000.05.15
申请号 KR19980044929 申请日期 1998.10.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SHIN, DONG IL;LEE, RAK GI
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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