PRODUCING METHOD OF INORGANIC COMPOSITE FILM

摘要

PURPOSE: A producing method of an inorganic composite film is provided to have a high precis ion degree of an inorganic film by heat-processing a supporting body formed with a metal film at a high temperature, to save energy by efficiently heat-processing at a relatively low temperature and to use as a dehydrogenation catalyst of organic compounds. CONSTITUTION: An organic metal compound is deposited on the surface of a porous supporting body, and a metal film is formed on the surface of the supporting body at a common temperature by flowing in reductive gas on the opposite face of the supporting body. Herein, the metal film has the thickness of 0.1 to 5 micrometer, and the reductive gas is the gas that hydrogen gas or hydrogen is mixed with argon. In addition, the metal film is produced by heat-processing the supporting body at a high temperature of 300 to 800°C under a hydrogen pressure as an after-processing process.