SEMICONDUCTOR EQUIPMENT HAVING HELIUM CHILLER,申请号KR19980045719-传众专利搜索

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发明名称	SEMICONDUCTOR EQUIPMENT HAVING HELIUM CHILLER
摘要	PURPOSE: A semiconductor equipment having a helium chiller is provided to maximize chilling efficiency of a wafer, by restraining an arc and a second electric discharge generated in a helium supplying line, and to prevent generation of particles which pollute the wafer. CONSTITUTION: A semiconductor equipment using a helium chiller has a helium supplying line(40). The helium supplying line is bent over more than two times to prevent a second electric discharge and an arc. The helium supplying line is made of a transparent material to identify inside thereof. The helium supplying line is Teflon. A foreign substance can not enter the helium supplying line because the helium supplying line is bent over two times, so that the second electric discharge and the arc can not be generated. Even when a hole of the helium supplying line is clogged up by particles, caused when the second electric discharge and the arc are generated, the particles can be removed by being identified with eyes.
申请公布号	KR20000027720(A)	申请公布日期	2000.05.15
申请号	KR19980045719	申请日期	1998.10.29
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	IM, KA SUN
分类号	H01L21/31;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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