HOSE FOR DISCHARGING GAS USED IN SEMICONDUCTOR PREPARATION DEVICE

摘要

PURPOSE: A gas discharge hose used in a semiconductor preparation device is provided to make easy the connection of components by making possible the lengthwise contraction and to prevent the breakage of the connected components. CONSTITUTION: A gas discharge hose(240) has a corrugated part(241) at a certain part so that the hose can bend freely and contracts lengthwise. The corrugated part is formed deeply and densely, and has flexibility to be bent and unbent lengthwise. Therefore, the connection between components becomes easy. And the stress given to a gas discharge tube(120) connecting components is reduced. Thereby the breakage of the gas discharge tube due to the use for long time is prevented.