| 摘要 |
PURPOSE: A device comprises a vacuum cassette elevator(10), a chamber(12), a robot arm(14), a wafer cassette(16), a slot valve(18), a first sensor sending part(20), a first sensor receiving part(22), and a second sensor sending part(24). The wafer cassette(16) is located on the robot arm(14) and a plurality of wafers are mounted on the wafer cassette. The slot valve (18) is connected to the chamber(12) for the insulation of the chamber and the slot entrance which is connected with the slot valve is formed thereof. The first sensing part is formed with a certain distance from the slit entrance and the second sensing part is formed at the camber(12). CONSTITUTION: A device comprises a vacuum cassette elevator(10), a chamber(12), a robot arm(14), a wafer cassette(16), a slot valve(18), a first sensor sending part(20), a first sensor receiving part(22), and a second sensor sending part(24). The wafer cassette(16) is located on the robot arm(14) and a plurality of wafers are mounted on the wafer cassette. The slot valve (18) is connected to the chamber(12) for the insulation of the chamber and the slot entrance which is connected with the slot valve is formed thereof. The first sensing part is formed with a certain distance from the slit entrance and the second sensing part is formed at the camber(12).
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