METHOD FOR FABRICATING FIELD EMISSION DISPLAY DEVICE

摘要

PURPOSE: A method for fabricating a field emission display device is provided to form a micro-sized gate hole without introducing additional equipment in order to form an electric field on tips and more tips. CONSTITUTION: A method for fabricating a field emission display device comprises the steps of: forming an insulating layer(12) on a substrate(11); forming a first gate electrode layer(13) on the top of the insulating layer; patterning to form a hole on the first gate electrode layer; forming a gate hole by etching the insulating layer so that whose side wall is tapered, with the first gate electrode layer as a mask; forming a second gate electrode layer(14) on the top and side wall of the first gate electrode layer; forming an aluminum sacrificial layer on the top and side wall of the second gate electrode layer; forming an emitter tip(16) in the shape of a cone in the gate hole; and removing the tip formation material and the aluminum sacrificial layer remained on the top of the second electrode layer.