VERTICAL DRIVER OF WAFER STAGE

摘要

PURPOSE: A vertical driver of a wafer stage is provided to minimize impedance of a motor and easy to assemble and change. CONSTITUTION: A vertical driver of a wafer stage comprises: a motor having a driving axis; a screw mounted on the same line as the driving axis; a pushing block inserted in the screw; and a transfer guide of which an end is fixed in the pushing block and the other end is fixed in the rotating block. The screw is connected to the driving axis by a coupling and the pushing block moves in the direction the screw rotates. The transfer guide transfers the wafer stage up and down by rotating the rotating block while moving after the screw together with the pushing block.