| 摘要 |
PURPOSE: A thin-film micromirror array-actuated(TMA) for preventing initial tilting of actuator and manufacturing method thereof support an actuator with an actuator supporting part and a spring bar, thereby preventing the initial tilting of the actuator, and restoring to the initial driving angle due to the restoring force of the spring bar. CONSTITUTION: A square stick-shaped spring bar(135) is arranged in both sides of an actuator(170) in the longitudinal direction. One side of the spring bar(135) is supported by a spring bar supporting part(137) formed corresponding to an actuator supporting part(131) and the other side of the spring bar(135) bent double contacts with the both sides of the actuator(170). The height of the spring bar(137) is equal to that of the actuator supporting part(131). The length and the width of the spring bar(135) are adjustable to control the driving angle of the actuator(170). Exactly, in case the length of the spring bar(135) becomes short, the driving angle of the actuator(170) is decreased and in case the length of the spring bar(135) becomes long, the driving angle of the actuator(170) is increased. Also, in case the width of the spring bar(135) becomes wide, the driving angle of the actuator(170) is reduced.
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