| 摘要 |
PURPOSE: A transparent vacuum line is provided to easily judge the failure of the process by viewing through a transparent vacuum line in vacuum process for exhausting by-products inside a process chamber, to early analyze the occurrence of leakage, and to easily determine the time to be cleaned. CONSTITUTION: A vacuum system comprises a prescribed space(20) in which semiconductor manufacturing processes are performed, a vacuum pump positioned out of the space, and a vacuum line(24) connecting the space and the vacuum pump. The vacuum line is made of transparent material such as teflon or plastic. The space is preferable to be a process chamber(20).
|
