发明名称 ASSEMBLY COMBINED WITH FEED THROUGH AND OUTER HEATER
摘要 PURPOSE: An assembly combined with a feed through and an outer heater is provided to prevent malfunction of a heater by combining the feed through and the outer heater. CONSTITUTION: An assembly combined with a feed through (50) and an outer heater(40) has the outer heater, a torque preventer, and a graphite nut(46) which are contracted to a split screw(48) in order. The feed through is contracted to the split screw through a pierced hole piercing a center of the split screw. The assembly has a fixer fixing the feed through and the outer heater in the torque preventer. A hole is formed on the torque preventer to see the feed through, and the fixer is contracted to the hole.
申请公布号 KR20000026345(A) 申请公布日期 2000.05.15
申请号 KR19980043853 申请日期 1998.10.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, CHAN HUI
分类号 H01L21/205;(IPC1-7):H01L21/205 主分类号 H01L21/205
代理机构 代理人
主权项
地址