发明名称 |
ASSEMBLY COMBINED WITH FEED THROUGH AND OUTER HEATER |
摘要 |
PURPOSE: An assembly combined with a feed through and an outer heater is provided to prevent malfunction of a heater by combining the feed through and the outer heater. CONSTITUTION: An assembly combined with a feed through (50) and an outer heater(40) has the outer heater, a torque preventer, and a graphite nut(46) which are contracted to a split screw(48) in order. The feed through is contracted to the split screw through a pierced hole piercing a center of the split screw. The assembly has a fixer fixing the feed through and the outer heater in the torque preventer. A hole is formed on the torque preventer to see the feed through, and the fixer is contracted to the hole.
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申请公布号 |
KR20000026345(A) |
申请公布日期 |
2000.05.15 |
申请号 |
KR19980043853 |
申请日期 |
1998.10.20 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HAN, CHAN HUI |
分类号 |
H01L21/205;(IPC1-7):H01L21/205 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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