PARALLEL ROTATION/TRANSLATION TABLE EQUIPPED WITH POSITION SENSITIVE DETECTOR USING OPTICAL SENSOR

摘要

PURPOSE: A parallel rotation/translation table equipped with position sensitive selector using optical sensor is provided to measure the location of a transportation stage to proceed home position operation in convergency or initialization work without using LVDT(Linear Variable Differential Transformer). CONSTITUTION: A first to a third actuators(46,48,50) supported by fixing plates(42,44) are at the left and right sides of a table bed(40). A transportation stage(52) carried by the first to the third actuator(46,48,50) is coupled on the upper side of the table bed(40). A first block(54) is formed on the right edge of the transportation stage(52). A second block(56) is formed on the left edge of the transportation stage(52). A position sensitive detector using optical sensor(58) is coupled to determine the location of the transportation stage(52) on the upper sides of the table bed(40) and the transportation stage(52). An operation stage(60) is fixed by a plurality of columns(62) on the upper side of the transportation stage(52).