| 摘要 |
PURPOSE: A dry etcher is provided to prevent damage of a semiconductor wafer, caused when a carrier is come off from a loader base plate, through detecting an operation of a sensor flag by a sensor when the carrier is come off from the loader base plate, when the carrier is loaded on the loader base plate. CONSTITUTION: A dry etcher comprises a loader base plate(20), a sensor flag(30), and a sensor. The loader base plate loads a carrier(10) which admits a semiconductor wafer. The sensor flag is coupled in a hinge structure on the loader base plate, and one end thereof is located in an upper side of the loader base plate and is pressed by the carrier. The other end of the sensor flag is located in a lower side of the loader base plate. The sensor equipped on a lower side of the base plate senses movements of the sensor flag, and generates a detecting signal when the movements are detected.
|
