| 摘要 |
PURPOSE: A microwave generator of an etching device is provided to reduce alternation operating time when alternating a magnetron assembly by disassembling a chiller line, and to prevent leakage of a microwave in the chiller line. CONSTITUTION: A microwave generator of an etching device comprises a magnetron assembly(11), a chiller line(13), a connection fitter(15), and a connector. The magnetron assembly generates a strong magnetic field. The chiller line is connected to the magnetron assembly. The connection fitter connects the magnetron assembly with the chiller line. The chiller line is connected to a Teflon hose. The connection fitter is made of a stainless material. The connector connects the magnetron assembly with the chiller line on the back side of a microwave generator.
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