METHOD FOR FORMING SPIN COATING LIQUID TO FORM SBT FERROELECTRIC LAYER

摘要

PURPOSE: A method for forming spin coating liquid to form an SBT ferroelectric layer is provided to manufacture a FRAM capacity which has a high ferroelectricity by formingg a fine structure of SBT ferroelectric TFT layer. CONSTITUTION: A method comprises a step of measuring the Sr-alkoxide, Bi-alkoxide and Ta-alkoxide; a step of forming each of the mixture liquid of the Sr-alkoxide, Bi-alkoxide and the Ta-alkoxide by making chemical reaction with the cheating aget; a step of forming Bi-Ta mixture liquid and the SBT mixture liquid; and a step of heating the ST mixture liquid. The method further comprises a step of cooling the SBT mixture liquid. The cheating agent is formed of one of acetylacetate or ethylacetoacetate. Therefore, spin coating liquid for forming fine structured SBT ferroelectric TFT layer is formed.