SPRAYER OF PHOTORESIST

摘要

PURPOSE: A sprayer of a photoresist is provided to shorten the static distance of a photoresist by minimizing the distance to a spray nozzle from a photoresist storage container. CONSTITUTION: A photoresist within a storage container is supplied to a supply line(46) by injecting air and nitride gas into the storage container. The photoresist is temporarily stored in a tank through a control valve(48), then is filtered through a filter(60) and is sprayed through a spray nozzle. If the supply of the photoresist is completed, the air and nitride gas are injected in another storage container based on a sensing signal generated from the lowest limit sensor(61) to supply the photoresist to the supply line(46). The photoresist is temporarily stored in the tank, is filtered through the filter and is sprayed through the spray nozzle.