发明名称 MANUFACTURING METHOD OF IMAGE SENSOR
摘要 PURPOSE: A manufacturing method of image sensor is provided to reduce reaction between a pad of an image sensor and developing solution, thereby reducing the resistance of the pad and the failure ratio in wire bonding. CONSTITUTION: A manufacturing method of image sensor comprises steps of: forming a red filter: forming a blue filter: forming a green filter: forming a resist pattern: removing the red filter: removing the resist pattern. The red filter is formed by exposing and developing a red photoresist film coated on a substrate. The blue filter is formed by exposing and developing a blue photoresist film coated on a substrate.
申请公布号 KR20000027772(A) 申请公布日期 2000.05.15
申请号 KR19980045789 申请日期 1998.10.29
申请人 HYUNDAI ELECTRONICS IND. CO., LTD. 发明人 PARK, CHEOL JUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址