发明名称 |
MANUFACTURING METHOD OF IMAGE SENSOR |
摘要 |
PURPOSE: A manufacturing method of image sensor is provided to reduce reaction between a pad of an image sensor and developing solution, thereby reducing the resistance of the pad and the failure ratio in wire bonding. CONSTITUTION: A manufacturing method of image sensor comprises steps of: forming a red filter: forming a blue filter: forming a green filter: forming a resist pattern: removing the red filter: removing the resist pattern. The red filter is formed by exposing and developing a red photoresist film coated on a substrate. The blue filter is formed by exposing and developing a blue photoresist film coated on a substrate.
|
申请公布号 |
KR20000027772(A) |
申请公布日期 |
2000.05.15 |
申请号 |
KR19980045789 |
申请日期 |
1998.10.29 |
申请人 |
HYUNDAI ELECTRONICS IND. CO., LTD. |
发明人 |
PARK, CHEOL JUN |
分类号 |
H01L27/146;(IPC1-7):H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|