| 摘要 |
PURPOSE: A thin-film micromirror array-actuated(TMA) manufacturing method forms a mirror on a step-removed post and the second sacrificial layer, thereby stably connecting the mirror with a top electrode of an actuator and preventing the diffusion of an incident light around the post. CONSTITUTION: The patterning of the second sacrificial layer exposes the portion formed in one side of a top electrode and in the contour of an actuator of a common electrode(200). Thus, the step is formed between the second sacrificial layer-patterned portion and the adjacent portion. To remove the step of the second sacrificial layer, one side of the exposed top electrode and both sides of a common electrode line(200) are put into a plating tank(235) including a plating solution, then the electroplating is performed to a post for supporting a mirror(230). A blue vitriol plating solution including a blue vitriol of 60 to 100g/l, a sulphuric acid of 150 to 225g/l and a chlorine of 20 to 80mg/l is used in the electroplating process. Therefore, the post formed by the electroplating removes the step of the second sacrificial layer pattern portion.
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