VACUUM DEPOSITION DEVICE FOR PREPARING PALLADIUM COMPOSITE INORGANIC MEMBRANE AND PREPARATION METHOD USING THE SAME

摘要

PURPOSE: A vacuum deposition device for preparing a palladium composite inorganic membrane is provided by which deposition rate can be controlled easily and the palladium composite inorganic membrane can have enhanced permeability on a specific gas. CONSTITUTION: A palladium composite inorganic membrane is obtained by: sublimating palladium organic compound of formula 1 by using a vacuum deposition device which comprises a vacuum deposition furnace(1) in which the palladium membrane is deposited to surface of a porous supporter at low vacuum state, a precursor chamber(2) in which the organic compound is sublimated, a teflon valve(3) which controls amount of the sublimated precursor, a heating coil(5), a temperature gauge(6), a diffusion pump(7), a vacuum pump(8) and hydrogen-introducing pump(9); depositing the sublimated palladium organic compound to surface of the porous supporter; and pyrolyzing it to give the composite inorganic membrane. Formula 1 is M £allyl| £cyclopentadiene|; M is Pd or Ni.