| 摘要 |
PURPOSE: A thin-film micromirror array-actuated(TMA) and manufacturing method thereof are provided to adjust the driving length of an active layer, thereby adjusting the driving angle of a mirror, and preventing the delamination and bending of the mirror. CONSTITUTION: A separation groove(155) is formed in two arms arranged parallel to the mirror(175)-arranged direction among four arms of a top electrode(150). The square ring-shaped top electrode(150) is divided into two parts by the separation groove(155). While the second signal is applied to the top electrode(150) formed on an actuator supporting part, the second signal is not applied to the top electrode(150) formed in a mirror(175)-bonded part. The area of the second signal-applied part of the top electrode(150) is adjusted depending on the position of the separation groove(155). Therefore, the potential difference between the top electrode(150) and a bottom electrode(140) is adjustable, and the deformation extent of an active layer(145) to be activated according to the potential difference is adjustable.
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