| 摘要 |
PROBLEM TO BE SOLVED: To secure stability for a degree of vacuum, and to enhance precision for light element analysis, by controlling pressure to shorten a convergence time for a set degree of vacuum in an analytical chamber. SOLUTION: An inverter device 10, in which an operation for changing the revolution number of a vacuum pump 3 to increase and decrease an evacuation capacity is conducted to make a pressure-detected value by a pressure sensor 11 consistent with a set vacuum value, is controlled to regulate the evacuation capacity. Responsiveness for evacuation by the pump 3 is enhanced thereby, and a covergence time for a set degree of vacuum is shortened, so as to secure stability for vacuum.
|
