| 摘要 |
A negative-working radiation-sensitive composition containing a) a compound which forms a strong acid on exposure to actinic radiation, b) a compound containing at least two acid-crosslinkable groups, and c) a water-insoluble polymeric binder which is soluble, or at least swellable, in aqueous alkaline solutions is characterised in that the compound (a) is a di- or tri- or tetrahydroxybenzene which is esterified with 2, 3 or 4 sulphonic acids of the general formula R-SO3H and which is optionally also substituted by a radical R', where R and R' have identical or different meanings and R is an optionally further substituted (C1-C10)alkyl, (C5-C10)cycloalkyl, (C6-C10)aryl, (C6-C10)aryl(C1-C10)alkyl or (C3-C9)heteroaryl radical, and R' is one of the radicals mentioned for R, or a (C1-C10)alkanoyl, (C1-C16)alkoxycarbonyl or a (C7-C11)aroyl radical. The novel radiation-sensitive composition is remarkable for a high resolution and a high sensitivity over a wide spectral range. It also has a high thermal stability and does not form any corrosive photolysis products on exposure to light. The invention furthermore relates to a radiation-sensitive recording material which is produced therefrom and which is suitable for producing photoresists, electronic components or printed circuit boards, or for chemical milling. |
