PIPE LINE SYSTEM EMPLOYING DIAPHRAGM VALVE FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A pipe line system employing diaphragm valve for manufacturing semiconductor device is provided to protect the diaphragm valve against outer impulse or environment and to prevent the valve from moving by fitting the controller into a frame. CONSTITUTION: A pipe line system employing diaphragm valve for manufacturing semiconductor device comprises: a diaphragm valve comprising a body(100), an inlet an outlet and a controller(130); and a frame(300) surrounding the diaphragm valve to protect it. The inlet is connected to the body. The outlet is opposed to the inlet and connected to the body(100). The controller(130) is connected to the body and controls gas flow rate into the outlet.