MIRROR FOR TMA AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A mirror of thin-film micromirror array-actuated(TMA) and manufacturing method thereof refrain the bending of a mirror caused by a thin film during a manufacturing process by using a reinforcing frame for preventing the bending of the edges of the mirror. CONSTITUTION: A reinforcing frame(520) extended from a mirror(500) in the form of 'L' is arranged in the edge of the mirror(500). The reinforcing frame(520) prevents the edge of the mirror(500) from being deformed upwards. Exactly, in case two edges of the upper and lower sides of the mirror(500) are bent upwards, two reinforcing parts of the right and left sides of the reinforcing frame(520) refrain the deformation of the mirror(500). In case two edges of the right and left sides of the mirror(500) are bent upwards, two reinforcing parts of the upper and lower sides of the reinforcing frame(520) refrain the deformation of the mirror(500).