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发明名称
WAFER STORING SYSTEM AND METHOD
摘要
申请公布号
KR100256529(B1)
申请公布日期
2000.05.15
申请号
KR19970028213
申请日期
1997.06.27
申请人
NEC CORPORATION
发明人
SHIMIZU, JUJI
分类号
H01L21/673;H01L21/00;H01L21/336;H01L29/78;(IPC1-7):H01L21/02
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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