发明名称 SCANNING TYPE NEAR FIELD OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a scanning type near field optical device provided with a probe enhanced in detection efficiency for signal light detection, having a high ratio of a signal to a noise by separating signal light from a background light component to be detected, and excellent in an in-plane resolution. SOLUTION: A scattering body and an electrode 24 are integrally formed in a scanning type near field optical microscope provided with the scattering body for converting evanescent light 4 modulated by an observed body 3 into scattered light, a photoelectric transfer part 5 for converting light intensity of the sacattered light into an electric signal, the electrode 24 for taking out the electric signal generated in the part 5 to an outside, and a position control means for controlling a relative position between the sacattering body and the observed body 3 to be a central wave length or less of the evanescent light 4. The electrode 24 constitutes at least one portion of the scattering body. A shielding body of the scattering body is constituted by the electrode 24.
申请公布号 JP2000131216(A) 申请公布日期 2000.05.12
申请号 JP19980305752 申请日期 1998.10.27
申请人 TOSHIBA CORP 发明人 NAKAJIMA KENTARO;INOMATA KOICHIRO
分类号 G01B11/30;G01N37/00;G01Q60/18;G01Q60/22;(IPC1-7):G01N13/14 主分类号 G01B11/30
代理机构 代理人
主权项
地址