APPARATUS FOR REGULATING ANGLE OF INCLINATION OF OPTICAL LENS

摘要

PURPOSE: An apparatus for regulating the angle of inclination of an optical lens is provided to set the focal position of light accurately on the surface of wafer by regulating optionally the angle of inclination of an optical lens according to the alignment of wafer. CONSTITUTION: An apparatus for regulating the angle of inclination of an optical lens includes a bimetal(10) installed in a lower part of an optical lens, a heater(20) adding heat to the bimetal(10) to bend the bimetal upward and downward, a controlling part(30) controlling the operation of the heater(20) according to the focal position of light passed through the optical lens, and a detector(40) detecting and transmitting the focal position of light to the controlling part(30).