PRODUCTION OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a liquid crystal display panel which does not increase the occupancy area rate of additional capacitance and does not reduce the opening ratio of pixels even when the size of the capacitance is increased by using a material containing a tantalum-base metal oxide as the material of a dielectric film forming the capacitance. SOLUTION: An SiO2 underlayer 20 is deposited on a light transmissive glass substrate 14. Metal Ta is deposited and etched to form a desired gate wiring pattern. Anodic oxidation is carried out to form a Ta2O5 film 24 in such a way that the film fully covers the Ta gate wiring. The Ta2O5 film 24 acts as a gate insulating film on the Ta gate electrode 22 of a-Si TFT and acts as the dielectric film of additional capacitance on the Ta gate wiring 23. An ITO transparent electrode is then deposited and etched to form a pixel electrode 9. The additional capacitance comprises the Ta gate wiring 23, the Ta2O5 film 24 and the pixel electrode 9.