MANUFACTURE OF ELECTRON SOURCE, AND ACTIVATING DEVICE

摘要

PROBLEM TO BE SOLVED: To stably provide an electron source having a perfect electron emitting characteristic by dividing the electron source into plural blocks in the atmosphere including the organic material in a conductive film formed with cracks, and having an activating process for applying voltage in order, and setting a partial pressure value of the organic material in the atmosphere in a desirable partial pressure range, and controlling the apply and stop of the voltage in response to the partial pressure value. SOLUTION: An activating voltage control device 1 has a function for receiving the signal from a detecting unit 9 for detecting component partial pressure of the atmosphere such as a quadrupole mass spectrometer, and for temporarily changing the wave form of the voltage being applied to an electron emitting element provided on an electron source substrate 71 through a voltage applying wire 3 in the case where a desirable component partial pressure is out of a certain range, and for restarting the apply of the desirable voltage when the component partial pressure enters the desirable partial pressure range. An upper limit of the allowable range of the partial pressure value is set at a value for giving the influence to the activation and a lower limit thereof is computed on the basis of the discharged gas rate of an activation hindering component, gas discharging rate and a partial pressure value of a volume activation hindering component for activation.