| 摘要 |
PROBLEM TO BE SOLVED: To cause a vibrating part to vibrate with a sufficiently large amplitude by reducing viscous resistance of gas in a gap between a vibration part and a substrate upper surface with a simple constitution, in a semiconductor device having a vibrating part which is on the substrate and movably connected with the substrate. SOLUTION: This semiconductor device is provided with a substrate 10 and a vibrator 20, which are arranged in the almost central part on the substrate 10, keeping a prescribed small distance from the surface and being in parallel with it. The vibrator 20 is displaceably connected with the upper surface of the substrate 10, via beams 11-1 to 11-4 and anchors 12-1 to 12-4. A through-hole 14 is formed at a position of the substrate 10 which faces the vibrator 20. Thereby a sufficiently large space can be ensured below the vibrator 20. When the vibrator 20 vibrates, its vibration will not be restrained by viscous resistance of gas existing between the vibrator 20 and the substrate 10, and the vibrator 20 can be made to vibrate. |
