| 摘要 |
PROBLEM TO BE SOLVED: To enhance the detection accuracy of angular velocity in an angular velocity detection device using an angular velocity detection element consisting of a monocrystalline crystal, and its drive method. SOLUTION: The angular velocity detection device is provided with a vibrator 1 with at least one branch for drive with at least two pairs of drive electrodes for performing self-excited vibration in the direction of in-plane (out-of plane) and a branch for detection with at least a pair of detection electrodes that are in-plane-(out-of-plane-) vibrated in synchronization with the branch for drive and is vibrated outside (inside) the surface due to coriolis force accompanied by rotation, an oscillation circuit 2 that is connected to the drive electrode of the vibrator for performing the self-excited vibration of the vibrator 1, a detection circuit 3 that is connected to the detection electrode of the branch for detecting the vibrator 1 and has a current/voltage conversion circuit consisting of a feedback resistor and an operational amplifier and an addition/ subtraction circuit, a detection circuit 4 for detection the output of the detection circuit 3 according to the output of the oscillation circuit 2, and a low-pass filter for cutting the AC output of the detection circuit 4. |
