APPARATUS FOR INSPECTING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To enable positive isolation of an insulating part formed on an inspecting electrode of a defective semiconductor integrated circuit element from the inspecting electrode and a contactor probe terminal, and also to enable positive conduction between an inspecting electrode of a good semiconductor integrated circuit element and the contact probe terminal. SOLUTION: The apparatus for inspecting a semiconductor integrated circuit includes an insulating resin supply device and a device for measuring a height of an insulating part 4 which is supplied from the resin supply device and which is made of insulating resin. The height measuring device, which comprises a laser projecting device 21, an optical detector 23 and an arithmetic unit 24, functions to measure the height of the insulating part 4 of the insulating resin formed on an inspecting electrode 3A of a defective semiconductor integrated circuit element.