| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing device and a method for heating treatment for validly using a space in a clean room, for simplifying the device, and for improving production tact. SOLUTION: A heating source is provided in a load lock chamber, and a gate g1 is opened from the side of a high vacuum waiting chamber 2 adjacent to the load lock chamber so that evacuation can be made. Then, the gate opening timing is controlled optimally, so that the high vacuum of heating treatment or the deterioration of the level for vacuum of the adjacent high-vacuum vessel can be prevented.</p> |
