| 摘要 |
PROBLEM TO BE SOLVED: To securely prevent a workpiece from being lowered in its temperature and shorten processing time. SOLUTION: An intermediate chamber 20 is provided between a first heat treatment chamber 16 and a second heat treatment chamber 18. In the intermediate chamber 20, a lower heat insulation member 64 is disposed and fixed below a conveyance level of a workpiece 13. An upper heat insulation member 68 is disposed upward the lower heat insulation member 64, which member 68 is moved in close vicinity to or away from the lower heat insulation member 64 with the aid of forward and backward energyzation of an air cylinder 66. The lower heat insulation member 64 is formed into a flat plate, and a recessed portion 68a opened downward is formed in the upper heat insulation member 68, and further upon opposite surfaces of both heat insulation members 64, 68 being brought into contact with each other a space S1 is defined between both heat insulation members 64 and 68.
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