| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical processing apparatus including a gas producer in which a liquid amount, liquid temperature, and liquid pressure are easily controlled, and mixed vapor with stabilized property is ensured. SOLUTION: In a chemical processing apparatus where it includes a processing tank for chemically processing an object to be processed with mixed vapor of solvent vapor and steam, it includes a basic solution vaporization container 31 including a heating section 31c therein, in which container an organic solvent solution is stored, and a reaction container 32 including a heating section 31 therein, in which container an auxiliary solution being water is stored, and in which solvent vapor vaporized in the basic solution vaporization container 31 is released into the auxiliary solution to produce the mixed vapor of the solvent vapor and the steam.
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