| 摘要 |
PROBLEM TO BE SOLVED: To provide an equipment for measuring relative displacement of a pair of members moving relatively with high accuracy regardless of temperature variation. SOLUTION: The displacement measuring equipment comprises a scale 11 fixed to one member 28 of a pair of member moving relatively, and a detector 12 fixed to the other member 24A and reading the graduation on the scale 11 wherein the scale 11 is fixed to one member 28 through a rolling bearing 5. Since frictional force between the scale 11 and the one member 28 can be reduced even if they exhibit different expansion/contraction upon variation of the ambient temperature, the strain based on thermal stress can be reduced, and since an error in the coefficient of temperature correction can be reduced, a sufficient measurement accuracy can be ensured even in case of high accuracy measurement.
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