| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device which has uniform heating performance and durability and does not give undesirable influence on an object to be heated. SOLUTION: A heating device 10 includes a heat resistant block body 12 having a heating surface 12f for mounting an object to be heated 11 and a heater 13 of a spiral shape laid on a lower surface 12u of the heat resistant block body 12. A heat conductive layer 14 is formed on a boundary between the lower surface 12u of the heat resistant block body 12 and the heater 13 and the whole lower surface 12u. Since the metal containing heat conductive layer 14 is interposed on the boundary between the heater 13 and the heat resistant block body 12, the heat conductivity between the heater 13 and the heat resistant block body 12 improves and the heat from the heater 13 efficiently transmits to the heat resistant block body 12 through the heat conductive layer 14. Thus, temperature distribution in the heat resistant block body 12 becomes uniform and the object to be heated is heated uniformly.
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