| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of accurately measuring analogous distance or displacement by compensating the temperature of the magnetic sensor using a semiconductor Hall element. SOLUTION: The magnetic sensor is provided with a substrate 16, semiconductor Hall element 17 arranged on the substrate surface, a magnet 19 arranged on the back side of the substrate and generating a magnetic field penetrating the semiconductor Hall element, a constant current circuit supplying the semiconductor Hall element with a constant current, a temperature sensor 18 arranged on the substrate and a zero point temperature compensation circuit for compensating the temperature characteristic of the zero point of the semiconductor Hall element according to the temperature detected with this temperature sensor. The sensitivity temperature coefficient of the semiconductor Hall element and the resistance temperature coefficient of the input resistance of the semiconductor Hall element are set nearly equal in absolute value but different in sign.
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