| 摘要 |
<p>PROBLEM TO BE SOLVED: To reinforce the grounding of a ceramic terminal and to obtain the optical waveguide device which has excellent microwave characteristics by fixing the ceramic terminal to a metallic package through a frame which has a coefficient of linear expansion close to that of a ceramic substrate. SOLUTION: To reduce stress to the ceramic terminal 60 when the ceramic terminal 60 which has a different coefficient of linear expansion is fixed to the metallic package, the ceramic terminal 60 is fixed to the metallic package with AuSn, silver solder, etc., across a KovarR-made frame 40 having a coefficient of linear expansion close to that of the ceramic substrate 46 so that part of the ceramic terminal 60 is fixed. The grounding of this ceramic terminal 60 is enhanced sufficiently since the metallic block 64 is fixed to the reverse surface of the ceramic substrate 46, so that impedance matching is obtained. An LN modulator which has excellent microwave characteristics can, therefore, be obtained.</p> |
