| 摘要 |
PROBLEM TO BE SOLVED: To provide a processor for improving throughput by shortening a time required for a drying process, which is the final stage of a series of processing, at the time of processing substrates one by one. SOLUTION: This substrate processor is provided with substrate holding and rotating means 12, 14, and 16 for holding a substrate in a horizontal attitude, and for rotating this substrate around a vertical shaft, and a treatment liquid supplying means 26 for supplying treatment liquid to the substrate held by the substrate holding and rotating means. Also, a gas jet port is arranged so as to be faced to the surface of a substrate W held by a spin chuck 12, a gas supplying unit 28 for supplying nitrogen gas through gas supplying piping 68 to the gas jet port is provided, and a heater 74 for heating the nitrogen gas is arranged so as to be inserted into the gas supply piping.
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