| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to make the contents of the chemical components contained in replenishing solutions to be supplied to a treating bath ideal values, in a diluting system which is capable of simply diluting concentrated replenishing solutions with a good accuracy and simultaneously supplying various concentrated replenishing solutions from a treating agent kit. SOLUTION: Prescribed amounts of different kinds of concentrated replenishing solutions are each supplied from a replenishing agent kit 100 to replenishing tanks 80, 82, 84 when a liquid surface detector provided at the replenishing tank 80 detects that the surface of the replenishing solution P1R in the replenishing tank 80 reaches the lowest limit level L1. Further, water PSR in the replenishing tank 86 is supplied to the replenishing tanks 80, 82, 84 through a washing pump 122, a washing valve 120 or the like to dilute the concentrated replenishing solutions. Here, supplies of water SPR to each replenishing tanks 80, 82, 84 are respectively stopped when a liquid surface detector provided at each replenishing tank detects that the surface of each replenishing solution P1R, P2RA, P2RB in each replenishing tank 80, 82, 84 reaches respective upper limit level H1, H2, H3.
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