| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas circulator which can circulate reaction gas without polluting it, and is satisfactory in durability of its bearing. SOLUTION: This gas circulator is equipped with a fan for circulating the gas, a rotary shaft 32 for transmitting torque to the fan, bearing rotors 33a and 3b fixed to the rotary shaft 32, bearing stator coils 33b and 33h for supporting without contact. The bearing rotors 33a and 33g are arranged apart from the bearing rotors 33a and 33g, and a bulkhead 6 for storing gas within and isolating bearing stator coils 33b and 33h from the gas. For the bulkhead 6, at least the surface on gas side is made of a material which is nonreactive with gas. The surfaces of the bearing rotor parts 33a and 33g are covered with the material which is nonreactive with gas. |
