发明名称 TRANSPORTATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a transportation device which can realize high-speed transportation of an object transported through movement of a support and improve its transportation efficiency by preventing positional shift of the object on the support. SOLUTION: The transportation device includes a movement mechanism 32 which moves a support 31 for carrying thereon an object B to be transported to an object B transfer position and into an object transportation area retracted from the transfer position. The mechanism 32 has a link mechanism 38 which expandably move the support 31. A mechanism 34 is provided operatively in association with the expanding/shrinking movement of the support 31 by the link mechanism 38 for allowing mounting and dismounting of the object B to and from the support 31 when expanded, and for holding the object B on the support 31 in the transportation area when contracted.
申请公布号 JP2000133692(A) 申请公布日期 2000.05.12
申请号 JP19980307481 申请日期 1998.10.28
申请人 TOSHIBA CORP 发明人 NAKAMURA YUJI
分类号 H01L21/677;B25J9/06;B25J15/00;B65G49/06;G02F1/1333;H01L21/68;H01L21/683;(IPC1-7):H01L21/68;G02F1/133 主分类号 H01L21/677
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